Ohio State’s First MOCVD Arrives on Campus

ORISadmin Facilities

mocvdOSU’s first metal organic chemical vapor deposition (MOCVD) system was delivered to Nanotech West Laboratory today. This $1.75 million, 3×2 close coupled showerhead (CCS) system from Aixtron, Inc. is a centerpiece of the OSU site of the Wright Center for Photovoltaic Innovation and Commercialization (PVIC), headed by Dr. Bob Davis and administered by The OSU Institute for Materials Research. As with all Nanotech facilities, the MOCVD system will be openly accessible to researchers at OSU, industry and government laboratories.

mocvd2The MOCVD system enables epitaxial growth of III-V compound semiconductors and nanostructures based on arsenides, phosphides, antimonides and dilute nitrides. While a primary application of the system is for advanced solar cell research and development, the system is designed to equally support OSU’s optoelectronic and electronic materials and devices community. With the addition of this MOCVD tool, mocvd3Nanotech West Laboratory adds to its wide array of state of the art process tools to create a unique facility open to OSU’s entire materials community. The installation process of the MOCVD system is on schedule, with an expected availability to the general community of June 2009.

For further inquiries about the new MOCVD capabilities, please contact IMR Member of Technical Staff, Dr. John Carlin at carlin.9@osu.edu.