Location: 095 Dreese Laboratories, 2015 Neil Avenue, Columbus, Ohio
Contact: James Jones, firstname.lastname@example.org, 614-292-2306
The Microelectronics Laboratory, located in the Department of Electrical and Computer Engineering, encompasses 4,000 square feet of class 100 and 1000 cleanroom space with additional associated laboratory areas. This facility shares space with the Semiconductor Epitaxy and Analysis Lab, resulting in a unique vertically integrated “atoms-to-devices” capability in a single facility. There are facilities to process and fabricate silicon integrated circuits and III-V devices, and this capability has been demonstrated by the implementation of circuits in a variety of technologies (MOS, bipolar, FETs, optoelectronics, and photovoltaics).
Processing equipment includes an Anatech 600 asher; ICP/RIE; CHA 4-Pocket electron beam evaporator; Rudolph Auto EL 4 ellipsometer; DekTak profilometer; Karl Suss MJB-3 mask aligner; Myriad 2001 aligner and associated photolithography equipment; annealing, oxidation and diffusion furnaces; 4-point probe; and wet chemical clean benches.